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The simulations are conducted via COMSOL Multiphysics. The KCl electrolyte concentration is set as 1 mM, and the size of the rectangular system is 200 nm in length and 500 nm in width. In this ...
This model relies exclusively on design and typical material parameters, together with measured values of intrinsic resonance frequency fin and quality factor Qin. Measuring fin and Qin at a pressure ...